The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 1999

Filed:

Jun. 02, 1997
Applicant:
Inventor:

Yasuhito Takeuchi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430-5 ; 29 2535 ;
Abstract

Composite piezo-electric members having an intended structure are fabricated based on the LIGA process which includes the exposure of synchrotron radiation X-rays, development and lithography. With the intention of reducing the cost of the X-ray exposure mask, it is made of wire gauze having a regular pattern and formed by electrocasting.


Find Patent Forward Citations

Takeuchi, Yasuhito. (1999). Method of fabricating composite piezo-electric members and a mask used (U.S. Patent No. 5891595). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5891595

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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