The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 1999
Filed:
May. 22, 1996
Applicant:
Inventors:
Badih El-Kareh, Hopewell Junction, NY (US);
Stephen Parke, Poughkeepsie, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324769 ; 324763 ; 324765 ; 438 17 ; 438 18 ; 257 48 ;
Abstract
According to the preferred embodiment, a defect monitor is provided that uses a floating gate structure. The defect monitor includes a common source, a common drain, and a plurality of floating gates interdispersed between the source and drain. Additionally, a conductor covers the plurality of floating gates. By applying a bias to the conductor and measuring the current flowing through the drain and source, the distribution of defects on the semiconductor wafer can be estimated.