The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 1999
Filed:
Jun. 20, 1997
Applicant:
Inventors:
Min Kuck Cho, Seoul, KR;
Jong Oh Kim, Seoul, KR;
Assignee:
Hyundai Electronics Industries, Co., Ltd., Kyungki-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438258 ; 438275 ;
Abstract
The present invention discloses a method of fabricating a flash memory device. In the present invention, since the dielectric film formed in the memory cell region is only exposed to the cleaning solution which is used in cleaning process preformed after removing the dielectric film formed in the low voltage transistor region, the number of damages applied to the dielectric film can be minimized, therefore, a good dielectric film can be obtained.