The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1999
Filed:
Nov. 19, 1996
Mikkel Lantz, Santa Clara, CA (US);
John T Shea, Sunnyvale, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method and apparatus for manufacturing products is provided with a computer that controls a processing tool, and a sensor that senses an operating condition of the processing tool. The sensor is coupled to the computer so that the setup and operation of the sensor is controlled by the computer. The control of the sensor and the processing tool by the computer is performed according to a single recipe, thereby providing automatic setup of the sensor in addition to the processing tool. Information from the sensor gathered during the processing step is integrated into the database coupled to the computer to provide correlation between the sensor data and lot and entity records related to the products being manufactured by the processing tool.