The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1999
Filed:
Feb. 19, 1997
Ko Noguchi, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
In a semiconductor device including a first insulating layer formed on a semiconductor substrate, a plurality of lower wiring layers made of one of aluminum and aluminum alloy and formed on the first insulating layer, a second insulating layer made of one of silicon oxide and PSG and formed on the first insulating layer, and a plurality of upper wiring layers made of one of aluminum and aluminum alloy, contact holes having a size larger than a width of the lower wiring layers are formed within the second insulating layer, and contact plugs are filled in the contact holes. Also, a conductive layer including one of Ti and W is provided between the lower wiring layers and the contact plugs.