The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 1999

Filed:

Dec. 27, 1996
Applicant:
Inventors:

Suk-Ki Min, Seoul, KR;

Seong-Il Kim, Seoul, KR;

Eun Kyu Kim, Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
438 34 ; 438 43 ; 438 44 ; 438 45 ; 438504 ; 438506 ; 438524 ; 438681 ; 438745 ; 438912 ; 438915 ; 148D / ; 148D / ; 148D / ; 148D / ;
Abstract

A fabrication method for a horizontal direction semiconductor PN junction array which can be achieved when an epitaxial layer is grown by a metalorganic chemical vapor deposition (MOCVD method) by introducing (or doping) a small amount of CCl.sub.4 or CBr.sub.4 gas, includes forming a recess on an N type GaAs substrate by using a non-planar growth, performing a growth method of a P type epitaxial layer on the N type GaAs substrate by a metalorganic chemical vapor deposition method, and forming a horizontal direction PN junction array of P-GaAs/N-GaAs or P-AlGaAs/N-GaAs by introducing a gas comprising CCl.sub.4 or CBr.sub.4 .


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Min, Suk-Ki. (1999). Fabrication method for horizontal direction semiconductor pn junction (U.S. Patent No. 5882950). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5882950

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