The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1999
Filed:
Aug. 04, 1997
Applicant:
Inventors:
Atsuhiro Fujii, Tokyo, JP;
Kazuo Kobayashi, Tokyo, JP;
Yasuhiko Horie, Tokyo, JP;
Hiroshi Ohnishi, Tokyo, JP;
Seiichi Mimura, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118728 ;
Abstract
It is an object to improve the corrosion resistance of a CVD jig made of quartz to prevent exfoliation of a film attached on the surface to prevent dust. The surface of a quartz CVD jig is burned with an arc plasma torch 14 so that the OH concentration in the quartz surface remains under 30 ppm.
Fujii, Atsuhiro. (1999). Jig for use in cvd and method of manufacturing jig for use in cvd (U.S. Patent No. 5882418). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5882418
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile