The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1999
Filed:
Jul. 25, 1997
Applicant:
Inventors:
Kohei Tarutani, Tsukuba, JP;
Itsuko Suzuki, Tsukuba, JP;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
95-8 ; 553852 ; 95226 ; 96351 ; 96413 ; 96417 ;
Abstract
A process to detect metal impurities in a gas or gas mixture including the steps of directing the gas or gas mixture through non-metallic pipings to a sampling device and sampling the gas or gas mixture for metal impurities detection, wherein the sampling device is close to an inlet and/or outlet of a machine employing the gas or gas mixture as a processing gas, the machine being surrounded by a booth containing a gaseous atmosphere which is continuously circulated in the booth, partially renewing said atmosphere continuously, and exhausting excess atmosphere.