The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1999
Filed:
May. 01, 1997
Applicant:
Inventors:
Dragan Popovich, Tucson, AZ (US);
John Lang Lombardi, Tucson, AZ (US);
Edward Daniel Albrecht, Paradise Valley, AZ (US);
Anthony Christopher Mulligan, Tucson, AZ (US);
Gregory John Artz, Tucson, AZ (US);
Assignee:
Advanced Ceramics Research, Inc., Tucson, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
451 41 ; 451285 ; 451288 ; 451398 ;
Abstract
A carrier is comprised of a thermoplastic polymer such as polyetheretherketone which is formed or fabricated as a uniform thickness, double sided flat sheet of material with wafer passages therethrough and gear teeth formed or fabricated around the peripheral edge thereof so as to be cooperative with a wafer polishing machine. An extrusion or rolling or calendering process provides a flat carrier which is, optionally, coated with thermoset polymer or thermoplastic film.