The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1999
Filed:
Mar. 15, 1996
Applicant:
Inventors:
Howard R Samuels, Newton, MA (US);
Jeffrey A Farash, Holbrook, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P / ;
U.S. Cl.
CPC ...
7351432 ; 7351416 ; 361280 ; 3612833 ;
Abstract
A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures. Such dimensional relationships are achieved through consistent spacing between desired operating structures and by adding new structures (i.e., dimensional control structures) which provide additional consistent spacing at desired locations within the micromachined device.