The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1999
Filed:
Aug. 16, 1996
James W Seeser, Santa Rosa, CA (US);
Thomas H Allen, Santa Rosa, CA (US);
Eric R Dickey, Northfield, MN (US);
Bryant P Hichwa, Santa Rosa, CA (US);
Rolf F Illsley, Santa Rosa, CA (US);
Robert F Klinger, Rohnert Park, CA (US);
Paul M Lefebvre, Santa Rosa, CA (US);
Michael A Scobey, Santa Rosa, CA (US);
Richard I Seddon, Santa Rosa, CA (US);
David L Soberanis, Santa Rosa, CA (US);
Michael D Temple, Santa Rosa, CA (US);
Craig C Van Horn, Sebastopol, CA (US);
Patrick R Wentworth, Santa Rosa, CA (US);
Optical Coating Laboratory, Inc., Santa Rosa, CA (US);
Abstract
A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.