The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 1999
Filed:
Dec. 23, 1996
Applicant:
Inventors:
Seiko Suzuki, Hitachiohta, JP;
Masayuki Miki, Hitachinaka, JP;
Satoshi Shimada, Hitachi, JP;
Masahiro Matsumoto, Hitachi, JP;
Masahiro Komachiya, Hitachi, JP;
Assignee:
Hitachi, Ltd., , JP;
Primary Examiner:
Int. Cl.
CPC ...
G01L / ; G01L / ;
U.S. Cl.
CPC ...
73727 ; 73726 ; 73720 ; 73 3512 ; 338 42 ;
Abstract
A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI substrate having a three-layered structure of a first silicon plate, a thermal oxide film, and a second silicon plate, wherein a combustion pressure is sensed on the basis of a pressure or a force applied to the first silicon plate.