The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 1999
Filed:
Dec. 29, 1997
Applicant:
Inventor:
Shye Lin Wu, Taichung, TW;
Assignee:
Acer Semiconductor Manufacturing Inc., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438254 ; 438397 ;
Abstract
This invention discloses a novel design for increasing the surface area of a stacked capacitor used in DRAM devices. The upper and lower plates of the capacitor comprises of several concave structures. The concave structures are first produces on an LS-SOG layer using focused ion beam lithography, which is then mapped to the lower plate of the capacitor. A dielectric layer is deposited, after which an upper plate is formed. The concave structures increases the plate area, thereby increasing charge storage capacity.