The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 1999
Filed:
Oct. 10, 1996
Applicant:
Inventors:
Rudiger J Stroh, Freiburg, DE;
Detlef Kunert, Denzlingen, DE;
Assignee:
Deutche ITT Industries GmbH, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430 22 ; 430 30 ;
Abstract
A method is disclosed for optimizing a pattern of semiconductor chips, which includes a mask being aligned via a reference point on the mask and an alignment mark on the wafer. The relative spatial position of the alignment mark is determined by a procedure for optimizing quantities which determine the fabrication costs of a semiconductor chip, while the position of the semiconductor chips relative to each other remain fixed during the optimization.