The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 1999
Filed:
Jun. 07, 1996
Kent H Carpenter, Stamford, CT (US);
ATMI EcoSys Corporation, San Jose, CA (US);
Abstract
A pressure damping system for damping pressure perturbations incident to switching of switchable flow control means in a fluid flow circuit. The pressure surge damping system comprises a throttle valve in the circuit, with the throttle valve and switchable flow control means being constructed and arranged for selective adjustment of the throttle valve when the switchable flow control means is switched, to attenuate pressure perturbations incident to switching of the switchable flow control means. The pressure surge damping system of the invention may be employed in a multi-vessel oxidation system for the treatment of semiconductor effluent gas, or in other applications involving periodic or cyclic switched flows which generate an upstream-propagating pressure wave detrimental to an upstream process facility.