The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1999
Filed:
May. 23, 1997
Applicant:
Inventor:
Henry R Miranda, Fremont, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
134 254 ; 134 34 ; 1341041 ; 134135 ; 134902 ; 118429 ;
Abstract
The present invention provides for a semiconductor bath system which has a tank, a housing which joins the tank, and a seal for the joint between the housing and the tank. A porous conduit is placed in close proximity with the seal. A pump drives washing fluid through the conduit and through the walls of the conduit so that the fluid irrigates the seal to preserve its integrity.