The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Oct. 04, 1996
Applicant:
Inventors:
Bernd Hensel, Eschborn, DE;
Friedrich Hofmann, Budingen, DE;
Hermann Koop, Ronnenberg, DE;
Paul Kaiser, Muchen, DE;
Eberhard Feick, Muchen, DE;
Franz Richter, Eichenau, DE;
Assignee:
Balzers und Leybold Deutschland Holding AG, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B / ;
U.S. Cl.
CPC ...
369 4411 ; 369 4415 ;
Abstract
In an apparatus for the laser beam exposure of a substrate disc (5), linked block tables (19, 29) are provided, which have each a piezotranslator (24, 31). This makes it possible to perform a fine correction of the movements very rapidly and very precisely.