The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Nov. 26, 1996
Tetsuya Hamada, Kyoto, JP;
Hidekazu Inoue, Kyoto, JP;
Abstract
A substrate processing system includes a plurality of processing stations for processing substrates, and a management station connected with the plurality of processing stations to constitute a computer network. Each processing station includes a plurality of processing units for treating the substrates, first storage device for storing processing recipes, and inter-station recipe copy unit for copying a desired processing recipe from another processing station and storing the copied processing recipe into the first storage device. Each processing recipe defines an order of conveyance of each substrate among the plurality of processing units and processing conditions in each processing unit. The management station includes second storage means for storing processing recipes for the plurality of processing stations, and specification upload/download means for transferring a desired processing recipe between the second storage means and the first storage means included in each of the plurality of processing stations and for storing the transferred processing recipe therein.