The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 1999

Filed:

Aug. 05, 1996
Applicant:
Inventor:

Michael A Pennington, Cary, NC (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511121 ; 156345 ;
Abstract

A plasma generator assembly for treatment of an item to be soldered in a vacuum chamber. The generator includes a chamber having a first opening for placement of a microwave source, formed so that plasma generated from a gas is spread out over a wide area; a second chamber for containing generated plasma effluent; and a partial barrier such as a perforated plate and/or an optical baffle attached to the second chamber. On the opposite side of the partial barrier from the second chamber is the area of the vacuum chamber for treatment of the item.


Find Patent Forward Citations

Pennington, Michael. (1999). Microwave gas phase plasma source (U.S. Patent No. 5866986). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5866986

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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