The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Jul. 25, 1996
Masatomo Mori, Saitama, JP;
Masahiro Nezu, Saitama, JP;
Rokurou Naya, Kanagawa, JP;
Shougo Suzuki, Kanagawa, JP;
Akebono Brake Industry Co., Tokyo, JP;
Nihon Inter Electronics Corporation, Hadano, JP;
Abstract
A small-sized, reliable, low-cost acceleration sensor includes a working mechanism having a large joint surface. In this respect, an acceleration sensor 1 is arranged so that a diaphragm portion 2D is formed on a (100) face of a plate of single crystal silicon. The four corner portions of the joint surface 2A of a square frame are expanded in the center direction of the plate of single crystal silicon so as to form expanded portions 2B. Moreover, the (100) face of the square plate of single crystal silicon is covered with a mask having at least an octagonal opening 10E before being subjected to anisotropic etching, so that the expanded portions 2B directed to the center portion are formed in the respective four corner portions of the plate of single crystal silicon.