The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Oct. 26, 1995
Hyeon Soo Park, Seoul, KR;
Hyun Woo Shin, Seoul, KR;
Chul Han Kwon, Seoul, KR;
Hyung Ki Hong, Seoul, KR;
Dong Hyun Yun, Seoul, KR;
Kyuchung Lee, Seoul, KR;
Sung Tae Kim, Seoul, KR;
LG Semicon Co., Ltd., Chungcheongbuk-Do, KR;
Abstract
A gas sensor and a method for fabricating the same includes a semiconductor substrate, a supporting layer formed on the semiconductor substrate, the supporting layer being electrically insulative and having a pattern groove formed therein, a heater formed in the pattern groove, an electrically insulating layer formed on the heater and the supporting layer, an electrode formed on the insulating layer, and a sensing layer formed on the electrode and the insulating layer to detect a target gas of interest according to a measured change in electrical conductivity or resistance thereof.