The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Mar. 24, 1997
Raymond K Lam, Park Ridge, NJ (US);
Charles E Melin, Bogota, NJ (US);
Guiseppe Colella, Orangeburg, NY (US);
Abstract
The present invention relates to high purity chromium metal suitable for deposition onto a semiconductor wafer or other substrate by sputtering. The high purity chromium metal is produced by a process that increases productivity, expands melting capability and provides consistent high purity chromium by reducing contamination by the dissolution of crucible material. The present invention provides high purity chromium by the addition of chromium oxide (Cr.sub.2 O.sub.3) to molten chromium to control oxygen content in the chromium thereby producing high purity chromium ingots and protecting the ceramic crucibles from chemical attach by the liquid chromium.