The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 1999

Filed:

Nov. 18, 1996
Applicant:
Inventors:

Lester H Vogt, Trabuco Canyon, CA (US);

Douglas A Bolton, Foothill Ranch, CA (US);

Assignee:

Radiant Technology Corporation, Fullerton, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
E27B / ; E27B / ; H01L / ;
U.S. Cl.
CPC ...
219388 ; 219441 ; 392411 ;
Abstract

An infrared conveyor furnace with controllable point source radiation elements incorporating a clean room internal environment. The conveyor transports moieties in an indexed manner through multiple heating zones heated by arrays of lamps. The lamps of each array are divided into a plurality of groups which are separately controlled to maintain a constant temperature across the surface of the moiety. The control of the lamp groups is accomplished through the use of a controller utilizing data from FTIR sensors mounted in a fused quartz barrier which is permeable by infrared radiation but which seals the lamp arrays from the heating zones.


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