The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 1999
Filed:
Mar. 28, 1996
Applicant:
Inventor:
Farrokh Omid-Zohoor, Sunnyvale, CA (US);
Assignee:
Advanced Micro Devices, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C / ;
U.S. Cl.
CPC ...
216 84 ;
Abstract
An integrated circuit device includes a substrate having a planar surface and isolating trenches etched from the substrate. The isolating trenches form corners with the surface of the substrate. The corners are shaped as slanted regions, having a 111-crystal plane structure. When a gate oxide layer is grown over the substrate, the trench corners will have a gate oxide layer of a greater thickness than the rest of the trench, thereby reducing parasitic transistors.