The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 1999
Filed:
Apr. 22, 1996
Hans-Juergen Fuesser, Gerstetten-Dettingen, DE;
Reinhard Zachai, Guenzburg, DE;
Wolfram Muench, Mannheim, DE;
Tim Gutheit, Ulm, DE;
Mona Ferguson, Ulm, DE;
Reiner Schaub, Darmstadt, DE;
Karl-Heinrich Greeb, Dreieich, DE;
Daimler-Benz Aktiengesellschaft, Stuttgart, DE;
Abstract
A composite structure for electronic components, having a base substrate with a flat side provided with a depression, and having a cover layer which is disposed on the flat side structured by the depression, and the depression being covered to form a hollow structure. The depression in the base substrate is created prior to the deposition of the cover layer and has a clear width measured parallel to the flat side that is less than one-half of its clear depth measured before the cover layer is applied. The vapor phase deposited cover layer is formed from a material which has a sufficiently high surface tension to promote three-dimensional growth of the vapor phase deposited layer.