The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 1999

Filed:

Jul. 12, 1996
Applicant:
Inventors:

Kuo-Ching Liu, Setauket, NY (US);

Chu-Kwo Liang, Whitestone, NY (US);

Jong-Kae Fwu, Bayside, NY (US);

Chung-Po Huang, Hauppauge, NY (US);

Assignee:

Robotic Vision Systems, Inc., Hauppage, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
382145 ; 382154 ; 382172 ; 356375 ; 25055923 ; 25055934 ;
Abstract

A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam is directed to an object and forms a spot at the point of impingement at a known X-Y position on the object. The laser beam is reflected at the spot and light reflected off-axially with respect to the source laser beam is detected by two position sensing detectors (PSDs). Simultaneous to detecting off-axially reflected light, retro-reflected light (i.e., the light reflected approximately co-axial with the source laser) is detected by a photo diode array.


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