The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1999
Filed:
Apr. 28, 1998
Applicant:
Inventors:
Motoshige Sumino, Kawagoe, JP;
Kazuhito Fukasawa, Kawagoe, JP;
Assignee:
Wako Pure Chemical Industries, Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07D / ; C07D / ; C07C / ; C08F / ;
U.S. Cl.
CPC ...
549214 ; 549 88 ; 558443 ; 5263294 ; 526341 ; 560128 ; 560187 ;
Abstract
A monomer of the formula: ##STR1## wherein R5, R6 and R7 are independently hydrogen, alkyl, cyano, alkyloxycarbonyl or carbamoyl; Z is a spacer or a direct link; and R is hydroxyalkyl having a protected terminal hydroxy, can produce a polymer useful for producting a resist composition.