The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 1998
Filed:
Nov. 18, 1994
Rimantas Vaitkus, Vilnius, LT;
Semiconductor Energy Laboratory Co., Ltd., Kanagawa, JP;
Abstract
A pulse-like heating is applied to a thin-film material having a high thermal conductivity such as a diamond thin film so that a response characteristic at this time is measured as a change in temperature of the thin film. The response characteristic reflects the thermal influence of the circumstance on the thin-film material, and depends, for example, on the flow rate of fluid. At this time, a sensor for obtaining an output depending on the fluid and the temperature of the fluid and a sensor for obtaining an output corresponding to the temperature of fluid are prepared to compare and process both the output with the result of obtaining an output which reflects the flow rate with accuracy not depending on the temperature.