The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 1998
Filed:
Apr. 04, 1995
Applicant:
Inventors:
Dieter M Gruen, Downers Grove, IL (US);
Alan R Krauss, Naperville, IL (US);
Shengzhong Liu, Canton, MI (US);
Xianzheng Pan, Wuhan Hubei, CN;
Christopher D Zuiker, LaGrange, IL (US);
Assignee:
The University of Chicago, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117104 ; 417108 ; 417929 ; 427577 ; 427575 ; 423446 ;
Abstract
A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.