The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1998
Filed:
Aug. 27, 1997
Applicant:
Inventors:
Zsolt Nenyei, Blaustein, DE;
Heinrich Walk, Allmendingen, DE;
Michael Maurer, Ulm, DE;
Thomas Knarr, Langenau, DE;
Assignee:
Steag-Ast GmbH, Kirchheim, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
219497 ; 219502 ; 21912143 ; 374121 ; 374161 ;
Abstract
A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.