The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1998
Filed:
Aug. 20, 1997
Ushio Hase, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
The present invention provides a gas analyzer used for contamination control of a clean environment by collecting samples from a plurality of measurement points while switching these points and continuously monitoring the volatile components present in the air of the environment, which analyzer requires no increase in number of parts and can give good response in a short period of measurement; and a gas analysis method using the gas analyzer. The gas analyzer of the present invention has two gas sampling units. Each of solution-feeding pumps 3, 15 is actuated for a different diffusion scrubber. The diffusion scrubber connected to the solution-feeding pump 15 is put in a measurement state; and the to-be-analyzed gas components absorbed by the absorbing solution in the diffusion scrubber are captured by a concentration column 14 and are analyzed by an ion chromatograph 30. During this period, a preliminary operation is conducted, in parallel, in the other diffusion scrubber connected to the solution-feeding pump 3. Thus, the adverse effect of the previous analysis by memory effect is prevented; response is improved; and the period of measurement is shortened.