The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1998
Filed:
Oct. 16, 1997
Yeong Cheol Hyeon, Daejon-Shi, KR;
Hyun Kyu Yu, Daejon-Shi, KR;
Electronics and Telecommunications Research Institute, Daejon-shi, KR;
Abstract
A method for manufacturing a semiconductor device having a stacked gate electrode structure of self-aligned polysilicon-metal, which is capable of minimizing the variation in structural and electrical characteristics of the gate electrode, while utilizing the manufacturing process of forming a conventional silicone semiconductor memory device, is disclosed. According to the method for manufacturing a semiconductor device of the present invention, the conventional technique generally used in the manufacturing process of forming the silicon semiconductor device can be effectively utilized. Further, an excessive etch loss in the oxide layer can be restrained by using the oxide spacer of the self-aligned oxide layer in forming the metal layer at the gate electrode structure. Furthermore, it has an advantageous effect that the stable electrical characteristics of the resulting device can be obtained by using the polysilicon layer as a basic constituting material of the gate electrode thereof.