The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 1998
Filed:
Aug. 06, 1997
Applicant:
Inventors:
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438692 ; 216 38 ; 216 88 ;
Abstract
When large-scale integrated circuits are produced, pronounced differences in height occur within conductor track levels. Those extreme topographies lead to difficulties during photo-lithographic processes, since there is a direct relationship between resolution and depth of focus. A production method for applying an insulation layer functioning as an intermetal dielectric is based on an ozone-activated selective deposition of silicon oxide. The conductor tracks are completely encapsulated with an insulation layer, so that bulges do not occur above upper edges of the conductor tracks.