The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 1998
Filed:
Nov. 07, 1996
Kenji Katori, Kanagawa, JP;
Hiroyuki Ohmori, Kanagawa, JP;
Mitsuharu Shouji, Kanagawa, JP;
Hiroshi Onuma, Miyagi, JP;
Sony Corporation, Tokyo, JP;
Abstract
A soft magnetic thin film according to the present invention can exhibit not only good soft magnetic properties but also an excellent anti-corrosion property, a low magnetostriction, a high saturation magnetic flux density and a high bonding ability to a base plate or substrate. The soft magnetic thin film has a composition of (Fe.sub.a M.sub.b Cu.sub.c Ru.sub.d).sub.e N.sub.f O.sub.g where a, b, c, d, e, f and g represent an atomic % of the respective elements and M represents at least one element selected from the group consisting of Si, Al, Ta, B, Mg, Ca, Sr, Cr, Mn, Zr, Nb, Ti, Mo, V, W, Hf, Ga, Ge and rare earth elements, with the limitations of 0.ltoreq.b.ltoreq.5, 0.ltoreq.c.ltoreq.8, 0.ltoreq.d.ltoreq.5, 0.ltoreq.c+d.ltoreq.8, a+b+c+d=100, 0.5.ltoreq.f.ltoreq.15, 0.1.ltoreq.g.ltoreq.13 and e+f+g=100, the soft magnetic thin film being prepared by reaction-sputtering in which a nitrogen and a steam (H.sub.2 O) are introduced.