The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 1998
Filed:
Jul. 18, 1997
Akitoshi Toda, Tokyo, JP;
Shuichi Ito, Sagamihara, JP;
Hirofumi Miyamoto, Tokyo, JP;
Akira Yagi, Sagamihara, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driven for applying voltages to the scanner for displacing the sample an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.