The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 1998

Filed:

Aug. 16, 1996
Applicant:
Inventors:

Akikazu Odawara, Chiba, JP;

Kazuo Chinone, Chiba, JP;

Satoshi Nakayama, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ; G01N / ;
U.S. Cl.
CPC ...
324248 ; 324224 ; 324235 ; 324241 ; 324262 ; 324263 ; 324750 ; 324760 ; 505846 ;
Abstract

To provide a nondestructive inspection apparatus with a reduced distance between a superconducting magnetic sensor and an object under inspection, a cryostat for cooling the sensor to a superconducting state is provided with inner and outer vessels. The inner vessel has a baseplate on which the magnetic sensor is disposed, and has an inner wall defining a central chamber for containing a refrigerant for cooling the magnetic sensor. The outer vessel has an inner wall defining a central chamber for containing the inner vessel, the magnetic sensor and the stage. A gap between the inner and outer vessels is evacuated to insulate the inner chamber from the ambient atmosphere. To facilitate ease of transferring an object to and from the stage for inspection, a load lock area is provided adjoining the outer vessel. The load lock has a movable inner wall portion opening to the inner chamber of the outer vessel and a movable outer wall portion opening to the ambient atmosphere so as to permit the transfer of an object to be inspected to and from the stage.


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