The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 1998
Filed:
Oct. 07, 1996
Shih-Tung Cheng, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
The present invention discloses a capacitive-type auto-sensing micro-probe used in high-sensitivity sensor elements. The micro-probe is constructed by semiconductor process technology using solid forming methods to comprise the elements of a probe, a probe cantilever, capacitors, an interface circuit and a signal processing circuit etc. and is fabricated in a micro chip so as to reduce the volume of the system, shorten the distance of signal transmission, and elevate signal sensitivity. By employing capacitive-type sensing principles, the micro-probe establishes capacitive plates on the top of the micro-probe to position at the corresponding capacitive plates located beneath an sensing substrate, and as the probe approaches the sample, the interaction of the sample reacts to the probe to generate deformation signals which, in sequence, are converted into capacitive variation signals. The signals are amplified to derive the surface characteristics of the sample.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile