The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 1998
Filed:
Nov. 20, 1995
Applicant:
Inventors:
Pius Gruenenfelder, Buelweg, CH;
Peter Buechel, Balzers, LI;
Klaus Leitner, Feldkirch-Nofels, AT;
Walter Haag, Grabs, CH;
Assignee:
Balzers Aktiengesellschaft, , LI;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429809 ; 20419212 ; 20429812 ;
Abstract
A sputter source and a corresponding target and holding device are provided in which the target is held by form locking arrangements. The target is pushed in an x-direction in the manner of a sliding drawer and is fixed by a releasable lock. A foil, which defines a cooling system on the holding device side, braces the fixed target when the cooling system is acted upon by pressure.