Semiconductor process chamber exhaust port quartz removal tool

Abstract

A tool for removing a quartz insert from an exhaust port of a semiconductor process chamber. In one embodiment, the tool of the present invention comprises a pair of generally elongated members (a first elongated member and a second elongated member) that are hingedly attached at a middle portion of each member. The first elongated member includes a first handle portion and a first end portion that are located on opposite ends of the middle portion of the elongated member. The second elongated member includes a second handle portion and a second end portion. The first and second handle portions are of sufficient length so as to be gripped by a user. A first head and a second head are pivotally attached to the first and second end portion of the first and second elongated members, respectively. Each head includes a face made of a pliable, gripping material, such as silicon rubber, for engaging the inner side wall surfaces of a quartz insert that is located within the exhaust port of a semiconductor processing chamber. The quartz insert is removed by inserting the first and second heads into the through bore opening of the quartz insert and moving the first and second handle portions outward away from one another such that the face of each head is in abutting engagement with the inner side wall surfaces of the quartz insert. Removal of the quartz insert is achieved by urging the first and second handle portions towards one another and pulling on the handle portions to slide the quartz insert out of the exhaust port opening.