The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 1998
Filed:
May. 21, 1997
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A heat-controlling device is provided with a transporting carriage for supporting and transporting a semiconductor substrate and a heating device having a plurality of heaters which apply heat in the width-wise direction of the heat-receiving member that is perpendicular to the transporting direction thereof and which are individually controlled by a controller. The controller only operates a set of the heaters that are adjacent the semiconductor substrate. Among the heaters being operated, those heaters, which are located at at least the leading end and the rear end in the transporting direction, have their outputs successively varied in accordance with the movement of the semiconductor substrate. Thus, it becomes possible to easily narrow the temperature distribution of the semiconductor substrate merely by controlling the output of the heaters.