The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 1998
Filed:
Jun. 27, 1996
Tatsuya Ishida, Aichi, JP;
Yasuo Imaeda, Aichi, JP;
Kabushiki Kaisha Tokai Rika Denki Seisakusho, Aichi, JP;
Abstract
A compact capacitance type acceleration sensor in which a mass portion having a plurality of movable electrodes are arranged in a recess portion formed on the surface of a p-type single crystal silicon base plate under the condition that the mass portion can be displaced. A plurality of stationary electrodes are arranged at a position opposed to the movable electrodes being separate from the movable electrodes. The mass portion is elastically supported by a support from the lower side and also elastically supported by four beams from the lateral side. Due to the above structure, the damping characteristic of the mass portion can be improved.