The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 1998
Filed:
Jul. 30, 1997
Applicant:
Inventor:
Hyeong-cheol Kim, Seongnam, KR;
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ; G02F / ;
U.S. Cl.
CPC ...
356381 ; 356375 ; 356376 ; 356387 ; 356237 ; 25055906 ; 25055919 ; 25055922 ; 359298 ; 359299 ; 359305 ; 359312 ;
Abstract
An object surface height measuring device with two acousto-optical modules for refracting light from a light emitter with predetermined refractive indices depending on frequency modulation so that the light is swept over the X and Y axes of an object, and two other acousto-optical modules synchronized with the signals of the first two acousto-optical modules, respectively, so that the light reflected from the object is focused onto a light receiving portion. The change in the height of the object is measured from the variation between the spot of light focused onto the light receiving portion and the center of the light receiver.