The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 1998
Filed:
Feb. 28, 1997
Roland Henneborn, Cologne, DE;
Peter Holz, Cologne, DE;
Michael Lechner, Linnich, DE;
Wolfgang Volker, Toenisvorst, DE;
Messer Griesheim GmbH, , DE;
Abstract
The prior art discloses machines which, for cooling the surface to be machined, have a gas supply line which opens into a gas outlet which is in the direct vicinity of the polishing disk. When CO.sub.2 is used as cooling gas, stoppages, which can be traced back to snow formation of the CO.sub.2, may occur in the line and in the gas outlet. In order to avoid blockages, the machine is assigned means for the supply of the liquid or supercritical CO.sub.2 which comprise a valve for regulating the throughflow quantity of the CO.sub.2 with an expansion nozzle, the valve being arranged inside the machine.