Scanning near-field optic/atomic-force microscope with observing

Abstract

A scanning near-field optic/atomic-force microscope comprises a holder for holding a sample immersed in a liquid, and a plate disposed over the holder for covering a surface of the liquid and for transmitting therethrough a laser light. A probe has an optical propagation body terminating in a distal end, and a light reflecting element disposed thereon, and the probe is immersed in the liquid. A light source emits a light which is introduced into the optical propagation body of the probe, which guides the light through the probe and out the distal end thereof to irradiate the sample. A detecting device detects information from the light irradiated on the sample and converts the information to an electric signal. A laser source irradiates the light reflecting element of the probe with a laser light for detecting a bending amount of the probe resulting from an interaction between the sample and the probe. An angle adjusting mechanism adjusts an optical axis of the laser light transmitted through the plate. A photoelectric conversion device receives the laser light reflected from the light reflecting element and converts the reflected light into an electric signal. A moving mechanism moves the sample relative to the probe, and a distance control device controls a distance between the surface of the sample and the distal end of the probe.