The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1998
Filed:
Sep. 06, 1996
Applicant:
Inventor:
Mitsutoshi Nakamura, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F / ;
U.S. Cl.
CPC ...
375500 ; 364496 ; 364498 ; 364578 ; 364573 ;
Abstract
A simulation method and a simulator determine a profile of particles, by determining whether or not each reaction formula, which describes a reaction of particles to generate reactants in semiconductor solids or gases, is in equilibrium, determining unknown variables excluding variables related to the reactants of each equilibrium reaction, forming continuity equations containing a plurality of time differential terms as functions of the unknown variables, linearizing and discretizing the time differential terms into the coefficient matrix and constant vector of simultaneous linear equations, and solving the simultaneous linear equations.