Optical integrated circuit, optical circuit waveguide device and process

Abstract

An optical integrated circuit wherein the waveguide network is constructed of a passive waveguide and a functional material is used on the functional portions, an optical circuit device which uses transparent electrodes, an optical switch which uses transparent electrodes and a functional portion made of a non-linear optical material, a matrix optical switch which converts inputted and outputted light at an electrical/optical converter element, and an optical integrated circuit or optical circuit device prepared by selective vapor growth of a functional material on desired regions, as well as an organic film growth process by which an organic film is selectively grown on recess walls and an organic film formation process whereby organic CVD or MLD is performed using a chamber divided into multiple regions.