The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1998
Filed:
Jul. 10, 1996
Applicant:
Inventors:
Serge Valette, Grenoble, FR;
Yves Fouillet, Voreppe, FR;
Assignee:
Commissariat a L'Energie Atomique, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359224 ; 359201 ; 359223 ; 359230 ;
Abstract
This invention relates to a scanning micro-element for an optical system, characterized in that it comprises: a substrate (12), a membrane (14, 16) made of a dielectric material deposited on a substrate surface, the membrane defining two planes making a non-zero angle .alpha. between them, part (14) of the membrane including a reflecting area (20) capable of being deflected along at least a first direction above a cavity formed in the substrate, means (22, 24, 26, 28) to deflect this part of the membrane along at least one direction.