The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1998
Filed:
Jul. 29, 1996
Applicant:
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; C23C / ; C23C / ;
U.S. Cl.
CPC ...
427 66 ; 4271262 ; 4271263 ; 427255 ; 4272557 ; 427419 ; 4272555 ; 118719 ; 118721 ; 118129 ; 118 20 ; 20479215 ; 20419226 ; 2041921 ;
Abstract
The present invention provides a process and apparatus for manufacturing organic electroluminescence cell, wherein the steps after formation of a transparent electrode on a substrate plate up to formation of a protective film are successively carried out in vacuum chambers which are isolated from the oxidative external atmosphere and thereafter withdrawn from the chambers into the air. A plurarity of layer portions of at least a portion of the electroluminescence cell is formed in a plurality of woriking chambers and withdrawn to the outside after formation of a protective film thereon.