The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1998
Filed:
Jan. 23, 1997
Dong-Gi Choi, Kyungki-Do, KR;
Hyungmo Yoo, Cupertino, CA (US);
Samsung Electronics Co., Ltd., Seol, KR;
Abstract
An improved gallium arsenide anneal boat and method for annealing comprises a slot structure for holding a wafer-stack of first and second GaAs wafers and a silicon wafer in the slot structure prior to annealing. The silicon wafer is tightly held in a central slot to maintain a vertical position and the GaAs wafers are loosely held in outside slots to avoid the formation of slip lines. The GaAs wafers slightly adhere to the silicon wafer to maintain a vertical position to avoid bending. Additionally, the wafer-stacks are separated by more than about 1.25 inches and processed in arsine gas at about 1 atm. pressure to avoid hazing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile