The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1998
Filed:
Dec. 26, 1996
Hee-Sun Chae, Suwon, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
The present invention relates to a semiconductor fabricating apparatus having an electrical system for transmitting a rotatory power through a belt of a motor to a pulley. The semiconductor fabricating apparatus having an electrical system of the present invention includes a sensor disposed in the vicinity of the belt for detecting a distance between the sensor and the belt and generating an electrical signal corresponding to a detected distance; an amplifier for amplifying the electrical signal to generate an amplified voltage; an analog-to-digital converter for converting the amplified voltage into a digital signal; and a controller for comparing the digital signal with a reference signal and determining whether the belt is loose on the pulley so as to generate a control signal. When the belt deviates out of the pulleys during the process, the loose belt makes the pulleys run idle, the belt cuts off, or the rotation of the motor stops, the present invention helps an operator recognize such an unexpected abrupt situation and take an appropriate action to solve the above problems at once.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile